发明公开
EP2485039A1 Micro-channel chip and micro-analysis system 有权
Mikrokanal-Chip和Mikroanalysesystem

Micro-channel chip and micro-analysis system
摘要:
There is provided a micro-channel chip that can be coated uniformly with a thin inorganic oxide film and that can prevent ionic hydrophobic substance from adsorbing on the surface of the inorganic oxide film. In this micro-channel chip, the surfaces of the inner walls of through-holes in an upper plate member and a channel of a lower plate member are entirely coated with a SiO 2 film. The SiO 2 film is formed with two layers, namely a bottom layer that contains a high content of carbon atoms and that is formed in a part that contacts a resin substrate, and a surface layer that contains nearly zero content of carbon atoms and that is formed in a part that exposes on the surface of a channel.
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