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公开(公告)号:EP2485039A1
公开(公告)日:2012-08-08
申请号:EP11159774.6
申请日:2011-03-25
申请人: Enplas Corporation
发明人: Ono, Koichi , Nakao, Tomoki , Niwayama, Akira
IPC分类号: G01N21/05
CPC分类号: G01N21/05 , B01L3/502707 , B01L2300/12 , B01L2300/16 , G01N2021/0346 , G01N2021/056
摘要: There is provided a micro-channel chip that can be coated uniformly with a thin inorganic oxide film and that can prevent ionic hydrophobic substance from adsorbing on the surface of the inorganic oxide film. In this micro-channel chip, the surfaces of the inner walls of through-holes in an upper plate member and a channel of a lower plate member are entirely coated with a SiO 2 film. The SiO 2 film is formed with two layers, namely a bottom layer that contains a high content of carbon atoms and that is formed in a part that contacts a resin substrate, and a surface layer that contains nearly zero content of carbon atoms and that is formed in a part that exposes on the surface of a channel.
摘要翻译: 提供了可以用薄的无机氧化物膜均匀地涂覆并且可以防止离子疏水物质吸附在无机氧化物膜的表面上的微通道芯片。 在该微通道芯片中,上板部件中的通孔的内壁表面和下板部件的通道的表面全部被SiO 2膜覆盖。 SiO 2膜形成为两层,即含有高含量碳原子并且形成在与树脂基板接触的部分中的底层和包含几乎零碳原子的表面层的层,即 形成在暴露在通道表面上的部分中。
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公开(公告)号:EP2485039B1
公开(公告)日:2014-11-19
申请号:EP11159774.6
申请日:2011-03-25
申请人: Enplas Corporation
发明人: Ono, Koichi , Nakao, Tomoki , Niwayama, Akira
IPC分类号: G01N21/05
CPC分类号: G01N21/05 , B01L3/502707 , B01L2300/12 , B01L2300/16 , G01N2021/0346 , G01N2021/056
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