发明公开
EP2487279A4 MOLD AND PRODUCTION METHOD FOR SAME, AND ANTI-REFLECTION FILM 有权
FORM UND HERSTELLUNGSVERFAHRENDAFÜRSOWIE ANTIREFLEXIONSFILM

MOLD AND PRODUCTION METHOD FOR SAME, AND ANTI-REFLECTION FILM
摘要:
A moth-eye mold fabrication method of the present invention includes the steps of: (a) anodizing a surface (18s) of an aluminum film (18) to form a porous alumina layer (14) which has a plurality of minute recessed portions (14p); (b) after step (a), bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions of the porous alumina layer; and (c) after step (b), further anodizing the surface to grow the plurality of minute recessed portions, wherein a voltage applied in step (c) is higher than a voltage applied in step (a). According to the present invention, a mold fabrication method is provided which is capable of preventing formation of a plurality of tiny pores in one micropore.
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