DIE INSPECTION METHOD
    4.
    发明公开
    DIE INSPECTION METHOD 有权
    芯片测试方法

    公开(公告)号:EP2573545A4

    公开(公告)日:2017-03-29

    申请号:EP11783559

    申请日:2011-05-17

    申请人: SHARP KK

    IPC分类号: G01N21/29

    摘要: A mold inspection method of the present invention is a method for inspecting a mold (1) which has a porous alumina layer (6) over its surface, the porous alumina layer (6) having a plurality of minute recessed portions, the method comprising: step a of providing, based on a relationship between a first parameter that is indicative of a thickness of the porous alumina layer and a color parameter that is indicative of a color of reflected light from the porous alumina layer, first color information which represents a tolerance of the first parameter of a porous alumina layer which has an uneven structure that is within a tolerance; step b of providing a mold which is an inspection subject, the mold having a porous alumina layer over its surface; step c of obtaining a color parameter which is indicative of a color of reflected light from the porous alumina layer of the inspection subject mold; and step d of determining a suitability of the first parameter of the inspection subject mold based on the obtained color parameter and the first color information. According to the present invention, it is possible to nondestructively and readily inspect whether or not the minute uneven structure at the surface is within a predetermined range.

    MOLD AND PRODUCTION METHOD FOR SAME, AND ANTI-REFLECTION FILM
    5.
    发明公开
    MOLD AND PRODUCTION METHOD FOR SAME, AND ANTI-REFLECTION FILM 有权
    FORM UND HERSTELLUNGSVERFAHRENDAFÜRSOWIE ANTIREFLEXIONSFILM

    公开(公告)号:EP2487279A4

    公开(公告)日:2015-08-05

    申请号:EP10822134

    申请日:2010-10-08

    申请人: SHARP KK

    摘要: A moth-eye mold fabrication method of the present invention includes the steps of: (a) anodizing a surface (18s) of an aluminum film (18) to form a porous alumina layer (14) which has a plurality of minute recessed portions (14p); (b) after step (a), bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions of the porous alumina layer; and (c) after step (b), further anodizing the surface to grow the plurality of minute recessed portions, wherein a voltage applied in step (c) is higher than a voltage applied in step (a). According to the present invention, a mold fabrication method is provided which is capable of preventing formation of a plurality of tiny pores in one micropore.

    摘要翻译: 本发明的蛾眼模具制造方法包括以下步骤:(a)阳极氧化铝膜(18)的表面(18s)以形成多孔氧化铝层(14),该多孔氧化铝层具有多个微小的凹陷部分 14P); (b)在步骤(a)之后,使多孔氧化铝层与蚀刻液接触,从而扩大多孔氧化铝层的多个微小凹部; 和(c)在步骤(b)之后,进一步阳极氧化该表面以生长多​​个微小凹陷部分,其中在步骤(c)中施加的电压高于在步骤(a)中施加的电压。 根据本发明,提供了能够防止在一个微孔中形成多个微细孔的模具制造方法。

    ANTIREFLECTION FILM AND METHOD FOR MANUFACTURING SAME
    9.
    发明公开
    ANTIREFLECTION FILM AND METHOD FOR MANUFACTURING SAME 有权
    抗反射箔及其制造方法

    公开(公告)号:EP2333590A4

    公开(公告)日:2011-09-07

    申请号:EP09814455

    申请日:2009-09-01

    申请人: SHARP KK

    摘要: The present invention provides an anti-reflective film that prevents wavelength dispersion from being applied to light transmitted through an anti-reflective film. The present invention is an anti-reflective film, which reduces reflection of visible light on a surface of a substrate by being mounted on the substrate, has a wavelength dispersion structure for applying first wavelength dispersion to visible light transmitting through the anti-reflective film, and contains a wavelength dispersion material for applying second wavelength dispersion to the visible light transmitting through the anti-reflective film, wherein visible light transmitted through the anti-reflective film has flat transmission wavelength dispersion in a visible light region.