发明公开
- 专利标题: MOBILE ELECTROSTATIC CARRIERS FOR THIN WAFER PROCESSING
- 专利标题(中): 移动静电支持要处理的薄晶圆
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申请号: EP10841770.0申请日: 2010-12-30
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公开(公告)号: EP2519967A2公开(公告)日: 2012-11-07
- 发明人: MOSLEHI, Mehrdad, M. , WANG, David, Xuan-Qi
- 申请人: Solexel, Inc.
- 申请人地址: 1530 McCarthy Boulevard Milpitas, CA 95035-7405 US
- 专利权人: Solexel, Inc.
- 当前专利权人: Solexel, Inc.
- 当前专利权人地址: 1530 McCarthy Boulevard Milpitas, CA 95035-7405 US
- 代理机构: Richardt Patentanwälte GbR
- 优先权: US291156P 20091230
- 国际公布: WO2011082371 20110707
- 主分类号: H01L21/677
- IPC分类号: H01L21/677 ; H01L21/683
摘要:
In one embodiment, there is provided a carrier comprising a top semiconductor layer having isolated positive electrode regions and isolated negative electrode regions separated by a frontside trench through the top semiconductor layer extending at least to an underlying insulating layer positioned between the top semiconductor layer and a bottom semiconductor layer. A dielectric layer covers the top exposed surfaces of the carrier. Backside trenches through the bottom semiconductor layer extending at least to the insulating layer form isolated backside regions corresponding to the frontside positive and negative electrode regions. Backside contacts positioned on the bottom semiconductor layer and coupled to the positive and negative electrode regions allow for the electric charging of the frontside electrode regions.
公开/授权文献
- EP2519967B1 MOBILE ELECTROSTATIC CARRIERS FOR THIN WAFER PROCESSING 公开/授权日:2014-12-10
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