发明公开
EP2564111A4 RING LIGHT ILLUMINATOR AND BEAM SHAPER FOR RING LIGHT ILLUMINATOR
审中-公开
RINGLICHTBELEUCHTER UND STRAHLENFORMERFÜRDEN RINGLICHTBELEUCHTER
- 专利标题: RING LIGHT ILLUMINATOR AND BEAM SHAPER FOR RING LIGHT ILLUMINATOR
- 专利标题(中): RINGLICHTBELEUCHTER UND STRAHLENFORMERFÜRDEN RINGLICHTBELEUCHTER
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申请号: EP11774522申请日: 2011-04-28
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公开(公告)号: EP2564111A4公开(公告)日: 2017-08-30
- 发明人: HILL ANDY
- 申请人: KLA-TENCOR CORP
- 专利权人: KLA-TENCOR CORP
- 当前专利权人: KLA-TENCOR CORP
- 优先权: US32886910 2010-04-28
- 主分类号: F21S2/00
- IPC分类号: F21S2/00 ; F21V5/00 ; F21V8/00 ; F21V29/00 ; F21W131/406 ; F21Y115/10 ; G01N21/88 ; G02B21/08 ; G02B21/10 ; G02B27/09
摘要:
A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a beam shaper comprising a light collector, a homogenizing means for light from the light source, and an imaging means for imaging an output of the homogenizing means into an area to be illuminated. The homogenizing means in embodiments is a rod, into which light from the light collector is directed. The end of the rod opposite the light collector is imaged by the imaging means into the area to be illuminated.
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