发明公开
- 专利标题: Modular wafering concept for wafering plant
- 专利标题(中): Modulares WaferkonzeptfürWaferanlage
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申请号: EP11186938.4申请日: 2011-10-27
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公开(公告)号: EP2586555A1公开(公告)日: 2013-05-01
- 发明人: Nasch, Philippe , Von Wartburg, Gregory
- 申请人: Applied Materials Switzerland Sàrl
- 申请人地址: Route de Genève 42 1033 Cheseaux-sur-Lausanne CH
- 专利权人: Applied Materials Switzerland Sàrl
- 当前专利权人: Applied Materials Switzerland Sàrl
- 当前专利权人地址: Route de Genève 42 1033 Cheseaux-sur-Lausanne CH
- 代理机构: Zimmermann & Partner
- 主分类号: B23D57/00
- IPC分类号: B23D57/00 ; B28D5/04
摘要:
A wire saw device (100) for sawing a plurality of slices of a workpiece (10) is described. The wire saw device includes a wire guide assembly with at least two wire guide cylinders (122) for guiding a wire (20) to form at least one wire web with at least one working area, wherein the at least two wire guide cylinders (122) have a rotation axis, a first compartment (102), which houses the wire guide assembly and has a first side portion of the compartment, which is essentially parallel to the rotation axis, wherein the first compartment further comprises a second side portion of the compartment, which opposes the first side portion and which is essentially parallel to the rotation axis, a second compartment (104) housing a spool (116) for providing new wire, wherein the second compartment (104) is adjacent the first side portion.
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