发明公开
- 专利标题: Wire saw control system and wire saw
- 专利标题(中): DrahtsägensteuerungssystemundDrahtsäge
-
申请号: EP11187103.4申请日: 2011-10-28
-
公开(公告)号: EP2586583A1公开(公告)日: 2013-05-01
- 发明人: Nasch, Philippe
- 申请人: Applied Materials Switzerland Sàrl
- 申请人地址: Route de Genève 42 1033 Cheseaux-sur-Lausanne CH
- 专利权人: Applied Materials Switzerland Sàrl
- 当前专利权人: Applied Materials Switzerland Sàrl
- 当前专利权人地址: Route de Genève 42 1033 Cheseaux-sur-Lausanne CH
- 代理机构: Zimmermann & Partner
- 主分类号: B28D5/00
- IPC分类号: B28D5/00
摘要:
A wire saw control system (1) for operating a wire saw (100) is provided. The wire saw is adapted for cutting a wafer (302, 304, 306, 308). The wire saw control system is configured to control the temperature of a wire (230) of a wire saw and includes a temperature sensor (20) for measuring the temperature of the wire; and a controller (25) for controlling at least one operating parameter of the wire saw based on the measured temperature. Measuring the temperature particularly includes measuring the temperature distribution. Furthermore, a method for controlling the temperature and for operating a wire saw is provided.
信息查询