发明公开
EP2586583A1 Wire saw control system and wire saw 审中-公开
DrahtsägensteuerungssystemundDrahtsäge

Wire saw control system and wire saw
摘要:
A wire saw control system (1) for operating a wire saw (100) is provided. The wire saw is adapted for cutting a wafer (302, 304, 306, 308). The wire saw control system is configured to control the temperature of a wire (230) of a wire saw and includes a temperature sensor (20) for measuring the temperature of the wire; and a controller (25) for controlling at least one operating parameter of the wire saw based on the measured temperature. Measuring the temperature particularly includes measuring the temperature distribution. Furthermore, a method for controlling the temperature and for operating a wire saw is provided.
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