发明公开
- 专利标题: PELLICLE AND MASK ADHESIVE AGENT FOR USE IN SAME
- 专利标题(中): 果皮和MASK责任以供其使用
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申请号: EP11803292申请日: 2011-06-29
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公开(公告)号: EP2592123A4公开(公告)日: 2014-01-29
- 发明人: TANEICHI DAIKI , KOZEKI TAKASHI , KOIDE AKIHIRO
- 申请人: MITSUI CHEMICALS INC
- 专利权人: MITSUI CHEMICALS INC
- 当前专利权人: MITSUI CHEMICALS INC
- 优先权: JP2010156864 2010-07-09
- 主分类号: C09J133/00
- IPC分类号: C09J133/00 ; C09J109/00 ; C09J125/08 ; C09J133/06 ; C09J153/00 ; G03F1/64
摘要:
The purpose is to provide a pellicle which has a mask adhesive layer that can be plastic-deformed readily particularly at a temperature at which exposure to light is carried out, rarely remains an adhesive agent upon the removal of the mask adhesive layer from a mask and has good handling properties, and which can prevent the position gap of a pattern. For achieving the purpose, a pellicle (10) is provided, which comprises a pellicle frame (14), a pellicle membrane (12) and a mask adhesive layer (15) containing a mask adhesive agent. The mask adhesive agent comprises 100 parts by mass of a thermoplastic elastomer (A) having a tand peak temperature of -20 to 30 DEG C and 20 to 150 parts by mass of an adhesiveness-imparting resin (B).
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