发明公开
- 专利标题： Multiple quantum well structure
- 专利标题（中）： Mehrfach-Quantentopfstruktur
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申请号： EP11189350.9申请日： 2011-11-16
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公开(公告)号： EP2595193A1公开(公告)日： 2013-05-22
- 发明人: Andreev, Aleksey , Williams, David , Tsuchiya, Ryuta , Watanabe, Keiji , Saito, Shinichi
- 申请人： Hitachi, Ltd.
- 申请人地址： 6-6, Marunouchi 1-chome Chiyoda-ku Tokyo 100-8280 JP
- 专利权人： Hitachi, Ltd.
- 当前专利权人： Hitachi, Ltd.
- 当前专利权人地址： 6-6, Marunouchi 1-chome Chiyoda-ku Tokyo 100-8280 JP
- 代理机构： Piotrowicz, Pawel Jan Andrzej
- 主分类号： H01L29/15
- IPC分类号： H01L29/15 ; H01L31/0352
摘要：
A multiple quantum well structure (1) comprises a multiple layer structure comprising alternating well and barrier layers (3, 4) comprising first and second materials respectively stacked in a first direction (z). Each barrier layer has a plurality of holes (6) filled with a third material so to form a plurality of respective bridge regions (9) which connect adjacent well layers. The bridge regions have dimensions of no more than 50 nm in directions (x, y) perpendicular to the first direction.
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