发明公开
- 专利标题: EUV EXPOSURE APPARATUS
- 专利标题(中): EUV-BELICHTUNGSGERÄT
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申请号: EP11740883.1申请日: 2011-07-28
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公开(公告)号: EP2598947A1公开(公告)日: 2013-06-05
- 发明人: BAER, Norman , LOERING, Ulrich , NATT, Oliver , WITTICH, Gero , LAUFER, Timo , KUERZ, Peter , LIMBACH, Guido , HEMBACHER, Stefan , WALTER, Holger , KWAN, Yim-Bun-Patrick , HAUF, Markus , STICKEL, Franz-Josef , VAN SCHOOT, Jan
- 申请人: Carl Zeiss SMT GmbH , ASML Netherlands B.V.
- 申请人地址: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 专利权人: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- 当前专利权人: Carl Zeiss SMT GmbH,ASML Netherlands B.V.
- 当前专利权人地址: Rudolf-Eber-Strasse 2 73447 Oberkochen DE
- 代理机构: Kohler Schmid Möbus
- 优先权: US369142P 20100730
- 国际公布: WO2012013747 20120202
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G21K1/06 ; G02B5/08
摘要:
A projection lens of an EUV-lithographic projection exposure system with at least two reflective optical elements each comprising a body and a reflective surface for projecting an object field on a reticle onto an image field on a substrate if the projection lens is exposed with an exposure power of EUV light, wherein the bodies of at least two reflective optical elements comprise a material with a temperature dependent coefficient of thermal expansion which is zero at respective zero cross temperatures, and wherein the absolute value of the difference between the zero cross temperatures is more than 6K.
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