发明公开
EP2647736A4 METHOD FOR CARBURIZING TANTALUM CONTAINER
审中-公开
VERFAHREN ZUM AUFKOHLEN EINESTANTALUMBEHÄLTERS
- 专利标题： METHOD FOR CARBURIZING TANTALUM CONTAINER
- 专利标题（中）： VERFAHREN ZUM AUFKOHLEN EINESTANTALUMBEHÄLTERS
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申请号： EP11844774申请日： 2011-07-06
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公开(公告)号： EP2647736A4公开(公告)日： 2017-08-09
- 发明人: WATANABE MASANARI , ABE YOSHIHISA
- 申请人： TOYO TANSO CO
- 专利权人： TOYO TANSO CO
- 当前专利权人： TOYO TANSO CO
- 优先权： JP2010266312 2010-11-30
- 主分类号： C23C8/64
- IPC分类号： C23C8/64
摘要：
Provided is a method for carburizing a tantalum container which can easily control the carburization thicknesses of various portions of the tantalum container and carburize the tantalum container with a uniform thickness. A method for carburizing a tantalum container 1 made of tantalum or a tantalum alloy to allow carbon to penetrate the tantalum container 1 includes the steps of: supporting the tantalum container 1 on a support member 5, 6 provided in a chamber 3 and setting the tantalum container 1 in the chamber 3; and reducing the pressure inside the chamber 3 and heating the interior of the chamber 3, wherein a carbon source is placed in the vicinity of a portion of the tantalum container 1 hard to carburize.
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