发明公开
- 专利标题: PIEZOELECTRIC STRUCTURE
- 专利标题(中): 压电结构
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申请号: EP11811408.1申请日: 2011-12-19
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公开(公告)号: EP2656409A1公开(公告)日: 2013-10-30
- 发明人: VAN DEN ENDE, Daan Anton , GROEN, Wilhelm Albert
- 申请人: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 申请人地址: Schoemakerstraat 97 2628 VK Delft NL
- 专利权人: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 当前专利权人: Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO
- 当前专利权人地址: Schoemakerstraat 97 2628 VK Delft NL
- 代理机构: Jansen, Cornelis Marinus
- 优先权: EP10196000 20101220
- 国际公布: WO2012087118 20120628
- 主分类号: H01L41/08
- IPC分类号: H01L41/08 ; H01L41/22
摘要:
A method of manufacturing a piezoelectric structure (10), comprising: providing a first set of electrodes (14a) and a second set of electrodes (14b) arranged in an alternating interdigitated pattern, wherein the electrodes are positioned at a predetermined interval (ti) from one another; providing elongate piezoelectric elements (16) having lengths longer than half the predetermined interval and shorter than the predetermined interval; providing a layer, comprising a fluid carrier and the piezoelectric elements, that connects the electrodes; applying an alternating voltage between the first and second set of electrodes so as to create an alternating electric field in the layer that aligns the piezoelectrical elements with the electric field; solidifying the fluid carrier to form a solid matrix material.
公开/授权文献
- EP2656409B1 PIEZOELECTRIC STRUCTURE 公开/授权日:2014-10-01
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