发明公开
- 专利标题： Scanning microscope having an adaptive scan
- 专利标题（中）： 扫描显微镜具有自适应筛选
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申请号： EP13167952.4申请日： 2013-05-16
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公开(公告)号： EP2665083A3公开(公告)日： 2016-04-06
- 发明人: Bugge, Cliff , Van Leer, Brandon
- 申请人： FEI COMPANY
- 申请人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 专利权人： FEI COMPANY
- 当前专利权人： FEI COMPANY
- 当前专利权人地址： 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 代理机构： Bakker, Hendrik
- 优先权： US201213474176 20120517
- 主分类号： H01J37/22
- IPC分类号： H01J37/22 ; H01J37/26 ; H01J37/28
摘要：
A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.
公开/授权文献
- EP2665083A2 Scanning microscope having an adaptive scan 公开/授权日：2013-11-20
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