发明授权
EP2685298B1 Method and system for grating couplers incorporating perturbed waveguides
有权
包含扰动波导的光栅耦合器的方法和系统
- 专利标题: Method and system for grating couplers incorporating perturbed waveguides
- 专利标题(中): 包含扰动波导的光栅耦合器的方法和系统
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申请号: EP13175823.7申请日: 2013-07-09
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公开(公告)号: EP2685298B1公开(公告)日: 2018-02-21
- 发明人: Verslegers, Lieven , Mekis, Attila
- 申请人: Luxtera, Inc.
- 申请人地址: 2320 Camino Vida Roble, Suite 100 Carlsbad, California 92011-1504 US
- 专利权人: Luxtera, Inc.
- 当前专利权人: Luxtera, Inc.
- 当前专利权人地址: 2320 Camino Vida Roble, Suite 100 Carlsbad, California 92011-1504 US
- 代理机构: Kuhnen & Wacker
- 优先权: US201261690952P 20120709
- 主分类号: G02B6/34
- IPC分类号: G02B6/34 ; G02B6/124
摘要:
Methods and systems for grating couplers (117A-117H) incorporating perturbed waveguides are disclosed and may include in a semiconductor photonics die (130), communicating optical signals into and/or out of the die utilizing a grating coupler (117A-117H) on the die, where the grating coupler comprises perturbed waveguides. The perturbed waveguides may comprise a variable width along their length. The grating coupler may comprise a single polarization grating coupler comprising perturbed waveguides and a non-perturbed grating. The grating coupler may comprise a polarization splitting grating coupler (PSGC) (403)that includes two sets of perturbed waveguides at a non-zero angle, or a plurality of non-linear rows of discrete shapes. The PSGC may comprise discrete scatterers (805) at an intersection of the sets of perturbed waveguides. The grating couplers may be etched in a silicon layer on the semiconductor photonics die or deposited on the semiconductor photonics die. The grating coupler may comprise individual scatterers (805) between the perturbed waveguides.
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