发明授权
EP2690648B1 Method of preparing and imaging a lamella in a particle-optical apparatus
有权
一种用于在粒子光学设备准备和成像薄片处理
- 专利标题: Method of preparing and imaging a lamella in a particle-optical apparatus
- 专利标题(中): 一种用于在粒子光学设备准备和成像薄片处理
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申请号: EP12178060.5申请日: 2012-07-26
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公开(公告)号: EP2690648B1公开(公告)日: 2014-10-15
- 发明人: Foord, David , Miller, Thomas , Routh, Brian , Tiemeijer, Peter , Janssen, Bart , Lazic, Ivan
- 申请人: FEI COMPANY
- 申请人地址: 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 专利权人: FEI COMPANY
- 当前专利权人: FEI COMPANY
- 当前专利权人地址: 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 US
- 代理机构: Bakker, Hendrik
- 主分类号: H01J37/305
- IPC分类号: H01J37/305 ; H01J37/26 ; H01J37/295
摘要:
The invention relates to a method of preparing and imaging a sample (101) using a particle-optical apparatus ( 100 ), equipped with an electron column (120) and an ion beam column (140), a camera system (110), a manipulator (160) the method comprising the steps of Deriving a first ptychographic image of the sample from a first electron image, then thinning the sample, and forming a second ptychographic image of the sample. In an embodiments of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning, In yet another embodiment the inner potential of the sample is determined and dopant concentrations are determined.
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