发明公开
- 专利标题： ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF
- 专利标题（中）： 抗反射涂料组合物及其方法
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申请号： EP12715147.0申请日： 2012-03-27
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公开(公告)号： EP2691439A1公开(公告)日： 2014-02-05
- 发明人: RAHMAN, M. Dalil , MCKENZIE, Douglas , SHAN, Jianhui , CHO, JoonYeon , MULLEN, Salem, K. , ANYADIEGWU, Clement
- 申请人： AZ Electronic Materials USA Corp.
- 申请人地址： 70 Meister Avenue Somerville, New Jersey 08876 US
- 专利权人： AZ Electronic Materials USA Corp.
- 当前专利权人： AZ Electronic Materials USA Corp.
- 当前专利权人地址： 70 Meister Avenue Somerville, New Jersey 08876 US
- 代理机构： Féaux de Lacroix, Stefan
- 优先权： US201113075749 20110330; US201213351681 20120117
- 国际公布： WO2012131479 20121004
- 主分类号： C08G61/02
- IPC分类号： C08G61/02 ; C09D165/00 ; G03F7/09 ; H01L21/027 ; G03F1/46
摘要：
The invention relates to an antireflective coating composition comprising a crosslinker and a crosslinkable polymer capable of being crosslinked by the crosslinker, where the crosslinkable polymer comprises a unit represented by structure (1 ), where A is a fused aromatic ring, B has a structure (2), and C is a hydroxybiphenyl of structure (3), (2) and (3) where R
1 is C
1 -C
4 alkyl and R
2 is C
1 -C
4 alkyl. The invention further relates to a process for forming an image using the composition.
1 is C
1 -C
4 alkyl and R
2 is C
1 -C
4 alkyl. The invention further relates to a process for forming an image using the composition.
公开/授权文献
- EP2691439B1 ANTIREFLECTIVE COATING COMPOSITION AND PROCESS THEREOF 公开/授权日：2015-05-13
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