发明公开
- 专利标题: METHOD OF TRANSFERRING THIN FILMS
- 专利标题(中): 法薄膜传输
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申请号: EP12788925.1申请日: 2012-05-23
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公开(公告)号: EP2715778A1公开(公告)日: 2014-04-09
- 发明人: CHUA, Lay-Lay , HO, Peter , PNG, Rui-Qi , KAM, Fong, Yu , SONG, Jie , WONG, Loke-Yuen , ZHUO, Jing-Mei , LOH, Kian, Ping , LIM, Geok-Kieng
- 申请人: National University of Singapore
- 申请人地址: 21 Lower Kent Ridge Road Singapore 119077 SG
- 专利权人: National University of Singapore
- 当前专利权人: National University of Singapore
- 当前专利权人地址: 21 Lower Kent Ridge Road Singapore 119077 SG
- 代理机构: Talbot-Ponsonby, Daniel Frederick
- 优先权: US201161489021P 20110523
- 国际公布: WO2012161660 20121129
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; B32B7/00 ; B32B27/00
摘要:
The present invention discloses a method for transferring a thin film from a first substrate to a second substrate comprising the steps of: providing a transfer structure and a thin film provided on a surface of a first substrate, the transfer structure comprising a support layer and a film contact layer, wherein the transfer structure contacts the thin film; removing the first substrate to obtain the transfer structure with the thin film in contact with the film contact layer; contacting the transfer structure obtained with a surface of a second substrate; and removing the film contact layer, thereby transferring the thin film onto the surface of the second substrate.
公开/授权文献
- EP2715778B1 METHOD OF TRANSFERRING THIN FILMS 公开/授权日:2023-06-07
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