发明公开
- 专利标题： METHOD FOR FORMING MAGNESIUM OXIDE THIN FILM AND PROCESSED PLATE
- 专利标题（中）： 生产氧化镁薄膜的方法和加工板
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申请号： EP12829861申请日： 2012-03-09
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公开(公告)号： EP2754737A4公开(公告)日： 2015-07-29
- 发明人: SUSAKI TOMOFUMI , HOSONO HIDEO , FUJIHASHI TADAHIRO , TODA YOSHITAKE
- 申请人： JAPAN SCIENCE & TECH AGENCY
- 专利权人： JAPAN SCIENCE & TECH AGENCY
- 当前专利权人： JAPAN SCIENCE & TECH AGENCY
- 优先权： JP2011197562 2011-09-09
- 主分类号： C30B29/16
- IPC分类号： C30B29/16 ; B01D53/02 ; B01D53/04 ; B01J20/04 ; B01J21/10 ; C01B32/50 ; C23C14/08 ; C23C14/28 ; C30B23/06
摘要：
A method for depositing a magnesium oxide thin film on a substrate by a laser abrasion method using a sintered body or single crystal of magnesium oxide as a target. In this method, a flat processed film made of magnesium oxide having a (111) plane as its front surface is prepared, using a substrate made of strontium titanate having a (111) plane as its principal surface or yttria-stabilized zirconia having a (111) plane as its principal surface, by directly depositing a film on the principal surface of the substrate and epitaxially growing the film.
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