发明公开
EP2789060A1 EDGE-EMITTING ETCHED-FACET LASERS 审中-公开
边缘蚀刻小面激光器

EDGE-EMITTING ETCHED-FACET LASERS
摘要:
A laser chip having a substrate, an epitaxial structure on the substrate, the epitaxial structure including an active region and the active region generating light, a waveguide formed in the epitaxial structure extending in a first direction, the waveguide having a front etched facet and a back etched facet that define an edge-emitting laser, and a first recessed region formed in said epitaxial structure, the first recessed region being arranged at a distance from the waveguide and having an opening adjacent to the back etched facet, the first recessed region facilitating testing of an adjacent laser chip prior to singulation of the laser chip.
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