发明公开
EP2796857A1 Optical non-destructive inspection apparatus and optical non-destructive inspection method
审中-公开
用于非破坏性测试和光学破坏检查方法的光学装置
- 专利标题: Optical non-destructive inspection apparatus and optical non-destructive inspection method
- 专利标题(中): 用于非破坏性测试和光学破坏检查方法的光学装置
-
申请号: EP14165587.8申请日: 2014-04-23
-
公开(公告)号: EP2796857A1公开(公告)日: 2014-10-29
- 发明人: Matsumoto, Naoki , Yoshida, Kouya , Matsumoto, Jun
- 申请人: JTEKT CORPORATION
- 申请人地址: 5-8, Minamisemba 3-chome Chuo-ku Osaka-shi Osaka 542-8502 JP
- 专利权人: JTEKT CORPORATION
- 当前专利权人: JTEKT CORPORATION
- 当前专利权人地址: 5-8, Minamisemba 3-chome Chuo-ku Osaka-shi Osaka 542-8502 JP
- 代理机构: Winter, Brandl, Fürniss, Hübner, Röss, Kaiser, Polte - Partnerschaft mbB
- 优先权: JP2013093852 20130426
- 主分类号: G01N21/63
- IPC分类号: G01N21/63 ; B23K31/12 ; G01N25/72 ; G01J3/10 ; G01N21/71
摘要:
There are provided an optical non-destructive inspection apparatus and an optical non-destructive inspection method, which can inspect a measurement object such as a wire bonding portion in a broad measurable temperature range in a short time, with high reliability. The apparatus includes a focusing-collimating unit (10), a heating laser beam source (21), a heating laser beam guide unit, an infrared detector (33), an emitted-infrared guide unit, first and second correcting laser beam sources (22, 23), first and second correcting laser beam guide units, first and second correcting laser detectors (31, 32), first and second reflected laser beam guide units, and a control unit (50). The control unit (50) controls the heating laser beam source (21) and the first and second correcting laser beam sources (22, 23), measures a temperature rise characteristic that is a temperature rise state of a measurement spot (SP) based on a heating time, on the basis of a detection signal from the infrared detector (33) and detection signals from the first and second correcting laser detectors (31, 32), and determines a state of a measurement object (bonding structure (97)) based on the measured temperature rise characteristic.
信息查询