公开(公告)号：EP2793017A1

公开(公告)日：2014-10-22

申请号：EP14164655.4

申请日：2014-04-14

申请人： JTEKT CORPORATION

发明人： Matsumoto, Naoki ,  Yoshida, Kouya ,  Matsumoto, Jun

IPC分类号： G01N21/63 ,  G01N21/71 ,  G01N25/72 ,  G01J3/10

CPC分类号： G01J5/10 ,  G01J5/0003 ,  G01J5/0096 ,  G01J5/026 ,  G01J5/0806 ,  G01J5/60 ,  G01J2005/607 ,  G01N21/63 ,  G01N21/71 ,  G01N25/72 ,  H01L2224/48472 ,  H01L2224/73257 ,  H01L2224/859

摘要： There are provided an optical non-destructive inspection apparatus that can inspect a measurement object such as a wire bonding portion in a broad measurable temperature range in a short time, with high reliability, and an optical non-destructive inspection method using it. The apparatus includes a focusing-collimating unit (10), a heating laser beam source (21), a heating laser beam guide unit, a first infrared detector (35), a second infrared detector (31), an emitted-infrared selective guide unit, and a control unit (50). The control unit (50) controls the heating laser beam source (21), measures a temperature rise characteristic that is a temperature rise state of a measurement spot (SP) based on a heating time, on the basis of a ratio between a detected value from the first infrared detector (35) and a detected value from the second infrared detector (31), determines a state of a measurement object (a bonding structure (97)) based on the temperature rise characteristic, and changes at least one of wavelengths of infrared light beams guided to the first infrared detector (35) and the second infrared detector (31) based on a measured temperature during measurement.

摘要翻译： 提供了一种光学非破坏性检查设备以及使用它的光学非破坏性检查方法，其能够在短时间内在宽的可测量温度范围内检查诸如引线键合部分的测量对象，并具有高可靠性。 该设备包括聚焦准直单元（10），加热激光束源（21），加热激光束引导单元，第一红外探测器（35），第二红外探测器（31），发射红外线选择引导器 单元和控制单元（50）。 控制单元（50）控制加热用激光束源（21），基于检测值（SP）的检测值与基于加热时间的测量点（SP）的温度上升状态的温度上升特性 来自第一红外线检测器35的检测值和来自第二红外线检测器31的检测值基于温度上升特性来判断测定对象（接合构造体97）的状态， 根据测定时的测定温度，导入第一红外线检测器（35）和第二红外线检测器（31）的红外光束。

公开(公告)号：EP2952918A1

公开(公告)日：2015-12-09

申请号：EP15170094.5

申请日：2015-06-01

申请人： JTEKT CORPORATION

发明人： Matsumoto, Naoki ,  Matsumoto, Jun ,  Yoshida, Kouya ,  Seo, Ryotaro

IPC分类号： G01R31/04 ,  G01R31/309

CPC分类号： G01J5/0896 ,  B23K1/0056 ,  G01J5/0806 ,  G01R31/046 ,  G01R31/309 ,  H05K3/306 ,  H05K3/325 ,  H05K2201/1059 ,  H05K2203/107 ,  H05K2203/1105 ,  H05K2203/162

摘要： An optical non-destructive inspection method includes: heating including setting a measurement spot (SP) on a surface of a workpiece and irradiating the measurement spot with heating laser light using a heating laser light source (21), heat ray detectors (31, 32), and a controller (50); acquiring a temperature rise property that is a temperature rise state of the measurement spot according to a heating time by detecting a heat ray radiated from the measurement spot to determine a temperature at the measurement spot; and determining whether or not a pressure contact state at pressure contact portions (91B, 92B), which include a contact area and a contact pressure, is appropriate based on the temperature rise property.

摘要翻译： 光学非破坏检查方法，包括：加热包含工件的一个表面上设置一个测定点（SP），并使用加热激光器光源（21），热射线检测器（31照射测量光斑用加热用激光光，32 ），以及控制器（50）; 通过检测热射线获取的温度上升特性都在测量点gemäß到加热时间的温度上升状态从测定点到确定性矿辐射在所述测量点的温度; 和确定性采矿是否在压力接触部分（91B，92B），其中包括一个接触区域和接触压力，是适当的基础上，温度上升特性的压接状态。

公开(公告)号：EP2796857A1

公开(公告)日：2014-10-29

申请号：EP14165587.8

申请日：2014-04-23

申请人： JTEKT CORPORATION

发明人： Matsumoto, Naoki ,  Yoshida, Kouya ,  Matsumoto, Jun

IPC分类号： G01N21/63 ,  B23K31/12 ,  G01N25/72 ,  G01J3/10 ,  G01N21/71

CPC分类号： G01N25/72 ,  B23K26/032 ,  B23K31/125 ,  G01J2005/0074 ,  G01K15/005 ,  G01N21/63 ,  G01N21/71 ,  G01R31/048 ,  G01R31/308 ,  H01L2224/48472 ,  H01L2224/73257 ,  H01L2224/859

摘要： There are provided an optical non-destructive inspection apparatus and an optical non-destructive inspection method, which can inspect a measurement object such as a wire bonding portion in a broad measurable temperature range in a short time, with high reliability. The apparatus includes a focusing-collimating unit (10), a heating laser beam source (21), a heating laser beam guide unit, an infrared detector (33), an emitted-infrared guide unit, first and second correcting laser beam sources (22, 23), first and second correcting laser beam guide units, first and second correcting laser detectors (31, 32), first and second reflected laser beam guide units, and a control unit (50). The control unit (50) controls the heating laser beam source (21) and the first and second correcting laser beam sources (22, 23), measures a temperature rise characteristic that is a temperature rise state of a measurement spot (SP) based on a heating time, on the basis of a detection signal from the infrared detector (33) and detection signals from the first and second correcting laser detectors (31, 32), and determines a state of a measurement object (bonding structure (97)) based on the measured temperature rise characteristic.

摘要翻译： 有设置在光学非破坏检查装置及光学非破坏检查方法，该方法可以检查测量对象：如在宽的温度范围内，在短时间内测引线接合部分，具有高可靠性。 该装置包括一个聚焦 - 准直装置（10），加热用激光束源（21），加热用激光束引导单元，以红外线检测器（33），（在发射的红外线导单元，第一和第二修正激光束源 22，23），第一和第二修正用激光引导单元，第一和第二修正用激光检测器（31,32），第一和第二反射的激光束引导单元，以及控制单元（50）。 所述控制单元（50）控制加热用激光束源（21）和所述第一和第二修正用激光源（22,23）测量到温度上升特性都是基于一个测量光斑（SP）的温度上升状态 的加热时间，从所述红外线检测器（33）和检测信号从所述第一和第二修正用激光检测器（31，32）的检测信号，并确定地雷的测量对象物的状态的基础上（接合结构（97）） 基于所测量的温度上升特性。

公开(公告)号：EP2796858A1

公开(公告)日：2014-10-29

申请号：EP14165589.4

申请日：2014-04-23

申请人： JTEKT CORPORATION

发明人： Matsumoto, Naoki ,  Yoshida, Kouya ,  Matsumoto, Jun

IPC分类号： G01N21/63 ,  G01N25/72 ,  G01J3/10 ,  G01N21/71 ,  B23K31/12

CPC分类号： G01N25/72 ,  G01J5/0096 ,  G01J5/0806 ,  G01J5/0846 ,  G01J5/0896 ,  G01K15/005 ,  G01N21/63 ,  G01N21/71 ,  H01L2224/48472 ,  H01L2224/73257 ,  H01L2224/859

摘要： There are provided an optical non-destructive inspection apparatus which can inspect a measurement object such as a wire bonding portion in a broad measurable temperature range in a short time, with high reliability, and an optical non-destructive inspection method using it. The apparatus includes a focusing-collimating unit (10), a heating laser beam source (21), a heating laser beam guide unit, an infrared detector (31), an emitted-infrared guide unit, a correcting laser beam sources (22), a correcting laser beam guide unit, a correcting laser detector (32), a reflected laser beam guide unit, and a control unit (50). The control unit (50) controls the heating laser beam source (21) and the correcting laser beam source (22), measures a temperature rise characteristic that is a temperature rise state of a measurement spot (SP) based on a heating time, on the basis of a detection signal from the infrared detector (31) and a detection signal from the correcting laser detector (32), and determines a state of a measurement object (bonding structure (97)) based on the measured temperature rise characteristic.

摘要翻译： 本发明提供一种光学非破坏检查装置以及使用该光学非破坏检查装置的光学非破坏检查方法，其能够在短时间内以较高的可靠性在较宽的可测量温度范围内检查诸如引线键合部分的测量对象。 该装置包括聚焦准直单元（10），加热激光束源（21），加热激光束引导单元，红外探测器（31），发射红外线引导单元，校正激光束源（22） 校正激光束引导单元，校正激光检测器（32），反射激光束引导单元和控制单元（50）。 控制部（50）控制加热用激光光源（21）和修正用激光光源（22），基于加热时间测定作为测定点（SP）的升温状态的升温特性， 基于来自红外线检测器31的检测信号和来自修正用激光检测器32的检测信号，基于测定出的温度上升特性来判定被测定物（接合结构体97）的状态。