发明公开
- 专利标题: PROCEDE DE FABRICATION D'UNE CELLULE PHOTOVOLTAIQUE
- 专利标题(英): Process for manufacturing a photovoltaic cell
- 专利标题(中): PROCESS光伏电池
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申请号: EP12819097.2申请日: 2012-12-19
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公开(公告)号: EP2801118A1公开(公告)日: 2014-11-12
- 发明人: PAVIET-SALOMON, Bertrand , GALL, Samuel , LANTERNE, Adeline , MANUEL, Sylvain
- 申请人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 申请人地址: Bâtiment le Ponant D 25 rue Leblanc 75015 Paris FR
- 专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人: Commissariat à l'Énergie Atomique et aux Énergies Alternatives
- 当前专利权人地址: Bâtiment le Ponant D 25 rue Leblanc 75015 Paris FR
- 代理机构: Cabinet Laurent & Charras
- 优先权: FR1250105 20120105
- 国际公布: WO2013102718 20130711
- 主分类号: H01L31/18
- IPC分类号: H01L31/18 ; H01L31/068
摘要:
This process for manufacturing a photovoltaic cell consists in: producing a semiconductor substrate (10) comprising first and second opposite sides (12, 16); producing, in the first side (12) of the substrate (10), a first semiconductor zone (14) doped by implanting first dopant elements into the thickness of the substrate and by thermally activating the first implanted dopant elements at a first activation temperature; and producing, on the second side (16) of the substrate (10), a second semiconductor zone (18) by implanting second dopant elements into the thickness of the substrate and by thermally activating the second implanted dopant elements at a second activation temperature that is below the first activation temperature. The substrate is more than 50 microns in thickness and at least the thermal activation of the first dopant elements is carried out by laser irradiation, the irradiation parameters being chosen so that the radiation is absorbed at most in a depth of the first micron of the substrate.
公开/授权文献
- EP2801118B1 PROCÉDÉ DE FABRICATION D'UNE CELLULE PHOTOVOLTAÏQUE 公开/授权日:2015-09-16
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