发明公开
EP2833127A1 Integrated resistive-type sensor array arrangement, each sensor comprising a sensitive metal oxide layer each having a different length between the electrodes
审中-公开
,每个传感器包含集成电阻传感器阵列布置,一个敏感的金属氧化物层,在电极之间的每个具有不同长度的
- 专利标题: Integrated resistive-type sensor array arrangement, each sensor comprising a sensitive metal oxide layer each having a different length between the electrodes
- 专利标题(中): ,每个传感器包含集成电阻传感器阵列布置,一个敏感的金属氧化物层,在电极之间的每个具有不同长度的
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申请号: EP13003797.1申请日: 2013-07-30
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公开(公告)号: EP2833127A1公开(公告)日: 2015-02-04
- 发明人: Bürgi, Lukas , von Waldkirch, Mark Stephan , Mayer, Felix
- 申请人: Sensirion AG
- 申请人地址: Laubisrütistrasse 50 8712 Stäfa CH
- 专利权人: Sensirion AG
- 当前专利权人: Sensirion AG
- 当前专利权人地址: Laubisrütistrasse 50 8712 Stäfa CH
- 代理机构: Mirza, Akram Karim
- 主分类号: G01N27/12
- IPC分类号: G01N27/12
摘要:
A chemical sensor arrangement is provided with at least two two-terminal metal oxide sensors (10,10') with a different electrode spacing and a processing unit combining measurements of the at least two sensors to eliminate contact effects and determine gas concentrations.
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