发明公开
- 专利标题： ENDPOINTING FOR FOCUSED ION BEAM PROCESSING
- 专利标题（中）： 离子束处理终止点确定FOCUSED
-
申请号： EP12881505申请日： 2012-07-16
-
公开(公告)号： EP2873088A4公开(公告)日： 2015-08-05
- 发明人: FULLER SCOTT EDWARD , DONALD JASON , SEEMUNTCHAIBOWORN TERMSUPT
- 申请人： FEI CO
- 专利权人： FEI CO
- 当前专利权人： FEI CO
- 优先权： US2012046975 2012-07-16
- 主分类号： H01J37/317
- IPC分类号： H01J37/317 ; H01J37/30 ; H01J37/304 ; H01J37/305 ; H01L21/265
摘要：
To expose a desired feature, focused ion beam milling of thin slices from a cross section alternate with forming a scanning electron image of each newly exposed cross section. Milling is stopped when automatic analysis of an electron beam image of the newly exposed cross section shows that a pre-determined criterion is met.
信息查询
