发明公开
- 专利标题: Electroplated silver alloy bump for a semiconductor structure
- 专利标题(中): 镀银合金凸块的半导体结构
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申请号: EP13194235.1申请日: 2013-11-25
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公开(公告)号: EP2879173A3公开(公告)日: 2015-08-26
- 发明人: Cheng, Shih Jye , Lu, Tung Bao
- 申请人: Chipmos Technologies Inc.
- 申请人地址: No. 1, R&D Road 1 Science-Based Industrial Park Hsinchu TW
- 专利权人: Chipmos Technologies Inc.
- 当前专利权人: Chipmos Technologies Inc.
- 当前专利权人地址: No. 1, R&D Road 1 Science-Based Industrial Park Hsinchu TW
- 代理机构: 2K Patentanwälte Blasberg Kewitz & Reichel
- 优先权: US201314073040 20131106
- 主分类号: H01L23/485
- IPC分类号: H01L23/485 ; H01L21/60 ; C25D3/64 ; C25D3/48
摘要:
A semiconductor structure includes a semiconductor device (100), a conductive pad (102) on the semiconductor device (100), and a Ag 1-x Y x alloy bump (101) over the conductive pad (102). The Y of the Ag 1-x Y x bump (101) comprises metals forming complete solid solution with Ag at arbitrary weight percentage (Au and/or Pd), and the x of the Ag 1-x Y x alloy bump (101) is in a range of from about 0.005 to about 0.25. A difference between standard deviation and mean value of a grain size distribution of the Ag 1-x Y x alloy bump (101) is in a range of from about 0.2 µm to about 0.4 µm. An average grain size of the Ag 1-x Y x alloy bump (101) on a longitudinal cross sectional plane is in a range of from about 0.5 µm to about 1.5 µm. The alloy bump (101) is formed by electroplating.
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