- 专利标题： Method of manufacturing a device for thermal insulation of micro-reactors
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申请号： EP15154853.4申请日： 2011-09-23
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公开(公告)号： EP2902109B1公开(公告)日： 2018-10-31
- 发明人: Jones, Benjamin , Fiorini, Paolo , Tanaka, Hiroyuki
- 申请人： IMEC VZW , Katholieke Universiteit Leuven
- 申请人地址： Kapeldreef 75 3001 Leuven BE
- 专利权人： IMEC VZW,Katholieke Universiteit Leuven
- 当前专利权人： IMEC VZW,Katholieke Universiteit Leuven
- 当前专利权人地址： Kapeldreef 75 3001 Leuven BE
- 代理机构： DenK iP
- 主分类号： B01L7/00
- IPC分类号： B01L7/00 ; B01L3/00 ; B81C1/00 ; B81B3/00 ; B81B7/00
摘要：
The present invention provides a micro-fluidic device (104), comprising: - a semiconductor substrate; - at least one micro-reactor (105) in said semiconductor substrate; - one or more micro-fluidic channels (101) in said semiconductor substrate, connected to said at least one micro-reactor (105); - a cover layer (106) bonded to the semiconductor substrate (900) for sealing the one or more micro-fluidic channels (101); and - at least one through-substrate trench (100) surrounding said at least one micro-reactor (105) and the one or more micro-fluidic channels (101).
公开/授权文献
- EP2902109A1 Method and device for thermal insulation of micro-reactors 公开/授权日：2015-08-05
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