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EP2927745A2 AN AGGLUTINANT FOR PELLICLE AND A PELLICLE INCLUDING THE SAME 审中-公开
PELLIKELKLEBER UND PELLIKEL MIT DIESEM KLEBER

AN AGGLUTINANT FOR PELLICLE AND A PELLICLE INCLUDING THE SAME
摘要:
There is provided a pellicle 1 for lithography having a frame 12, a film 11 and an agglutinant layer 13 (an adhesive to bond the pellicle on a photomask), in which the agglutinant layer 13 is doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layer 13 and the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.
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