发明公开
EP2927745A2 AN AGGLUTINANT FOR PELLICLE AND A PELLICLE INCLUDING THE SAME
审中-公开
PELLIKELKLEBER UND PELLIKEL MIT DIESEM KLEBER
- 专利标题: AN AGGLUTINANT FOR PELLICLE AND A PELLICLE INCLUDING THE SAME
- 专利标题(中): PELLIKELKLEBER UND PELLIKEL MIT DIESEM KLEBER
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申请号: EP15157728.5申请日: 2015-03-05
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公开(公告)号: EP2927745A2公开(公告)日: 2015-10-07
- 发明人: Horikoshi, Jun
- 申请人: Shin-Etsu Chemical Co., Ltd.
- 申请人地址: 6-1, Ohtemachi 2-chome Chiyoda-ku Tokyo 100 JP
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: 6-1, Ohtemachi 2-chome Chiyoda-ku Tokyo 100 JP
- 代理机构: TBK
- 优先权: JP2014077531 20140404
- 主分类号: G03F1/00
- IPC分类号: G03F1/00 ; G03F1/64 ; G03F1/62
摘要:
There is provided a pellicle 1 for lithography having a frame 12, a film 11 and an agglutinant layer 13 (an adhesive to bond the pellicle on a photomask), in which the agglutinant layer 13 is doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layer 13 and the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.
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