发明公开
EP2937385A1 BOTTOM LAYER FILM-FORMING COMPOSITION OF SELF-ORGANIZING FILM CONTAINING STYRENE STRUCTURE
审中-公开
BODENSCHICHTFILMBILDUNGSZUSAMMENSETZUNG EINER SELBSTORGANISIERENDEN,FILMHALTIGEN STYROLSTRUKTUR
- 专利标题: BOTTOM LAYER FILM-FORMING COMPOSITION OF SELF-ORGANIZING FILM CONTAINING STYRENE STRUCTURE
- 专利标题(中): BODENSCHICHTFILMBILDUNGSZUSAMMENSETZUNG EINER SELBSTORGANISIERENDEN,FILMHALTIGEN STYROLSTRUKTUR
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申请号: EP13864564.3申请日: 2013-12-16
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公开(公告)号: EP2937385A1公开(公告)日: 2015-10-28
- 发明人: SOMEYA, Yasunobu , WAKAYAMA, Hiroyuki , ENDO, Takafumi , SAKAMOTO, Rikimaru
- 申请人: Nissan Chemical Industries, Ltd.
- 申请人地址: 7-1 Kanda-Nishiki-cho 3-chome Chiyoda-ku Tokyo 101-0054 JP
- 专利权人: Nissan Chemical Industries, Ltd.
- 当前专利权人: Nissan Chemical Industries, Ltd.
- 当前专利权人地址: 7-1 Kanda-Nishiki-cho 3-chome Chiyoda-ku Tokyo 101-0054 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2012276134 20121218
- 国际公布: WO2014098025 20140626
- 主分类号: C08L25/04
- IPC分类号: C08L25/04 ; C08F12/08 ; C08K5/3447 ; C09D125/08 ; G03F7/38 ; H01L21/027
摘要:
There is provided a composition for forming an underlayer film used for an underlayer of a self-organizing film.
An underlayer film-forming composition of a self-organizing film, the underlayer film-forming composition comprising: a polymer consisting of a unit structure derived from an optionally substituted styrene and a unit structure derived from a crosslink forming group-containing compound, the polymer containing 60 mol% to 95 mol% of the unit structure derived from the styrene and 5 mol% to 40 mol% of the unit structure derived from the crosslink forming group-containing compound relative to the whole unit structures of the polymer. The crosslink forming group is a hydroxy group, an epoxy group, a protected hydroxy group, or a protected carboxy group. The crosslink forming group-containing compound is hydroxyethyl methacrylate, hydroxyethyl acrylate, hydroxypropyl methacrylate, hydroxypropyl acrylate, hydroxystyrene, acrylic acid, methacrylic acid, glycidyl methacrylate, or glycidyl acrylate.
An underlayer film-forming composition of a self-organizing film, the underlayer film-forming composition comprising: a polymer consisting of a unit structure derived from an optionally substituted styrene and a unit structure derived from a crosslink forming group-containing compound, the polymer containing 60 mol% to 95 mol% of the unit structure derived from the styrene and 5 mol% to 40 mol% of the unit structure derived from the crosslink forming group-containing compound relative to the whole unit structures of the polymer. The crosslink forming group is a hydroxy group, an epoxy group, a protected hydroxy group, or a protected carboxy group. The crosslink forming group-containing compound is hydroxyethyl methacrylate, hydroxyethyl acrylate, hydroxypropyl methacrylate, hydroxypropyl acrylate, hydroxystyrene, acrylic acid, methacrylic acid, glycidyl methacrylate, or glycidyl acrylate.
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