发明公开
EP2942609A1 Bolometer and method for measurement of electromagnetic radiation
审中-公开
Bolometer und Verfahren zum Messen elektromagnetischer Strahlung
- 专利标题: Bolometer and method for measurement of electromagnetic radiation
- 专利标题(中): Bolometer und Verfahren zum Messen elektromagnetischer Strahlung
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申请号: EP14167385.5申请日: 2014-05-07
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公开(公告)号: EP2942609A1公开(公告)日: 2015-11-11
- 发明人: Röhrer, Georg , Carniello, Sara
- 申请人: ams AG
- 申请人地址: Schloss Premstätten Tobelbader Strasse 30 8141 Unterpremstätten AT
- 专利权人: ams AG
- 当前专利权人: ams AG
- 当前专利权人地址: Schloss Premstätten Tobelbader Strasse 30 8141 Unterpremstätten AT
- 代理机构: Epping - Hermann - Fischer
- 主分类号: G01J5/20
- IPC分类号: G01J5/20 ; G01J5/02
摘要:
A bolometer (10) comprises a first and a second suspension beam (12, 13) and a semiconductor portion (11) that is suspended by the first and the second suspension beam (12, 13) and comprises a first region (17) of a first conductivity type and a second region (18) of a second conductivity type. The first region (17) comprises a first triangle (21) or at least two stripes (40, 41) or islands (60, 61) which each contribute to a non-short-circuited diode (20) with the second region (18).
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