ELECTROMAGNETIC WAVE SENSOR
    10.
    发明公开

    公开(公告)号:EP4372335A1

    公开(公告)日:2024-05-22

    申请号:EP23209715.4

    申请日:2023-11-14

    申请人: TDK Corporation

    IPC分类号: G01J5/02 G01J5/20 G01J5/22

    摘要: The electromagnetic wave sensor includes: a first substrate; a first wire which extends in a first direction parallel to a substrate surface of the first substrate in a plan view from a direction perpendicular to the substrate surface; a second wire which extends in a direction parallel to the substrate surface and different from the first direction in the plan view; and an electromagnetic wave detector which is electrically connected to the first wire and is electrically connected to the second wire, wherein the first wire is located on the first substrate side in relation to the electromagnetic wave detector in a third direction orthogonal to the first direction and the second direction and the second wire is located on a side opposite to the first substrate in relation to the electromagnetic wave detector in the third direction.