发明公开
EP2949785A1 METHOD FOR ELECTROCHEMICALLY DEPOSITING METAL ON A REACTIVE METAL FILM
审中-公开
过程,以活性金属金属层所述的电化学沉积
- 专利标题: METHOD FOR ELECTROCHEMICALLY DEPOSITING METAL ON A REACTIVE METAL FILM
- 专利标题(中): 过程,以活性金属金属层所述的电化学沉积
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申请号: EP15169683.8申请日: 2015-05-28
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公开(公告)号: EP2949785A1公开(公告)日: 2015-12-02
- 发明人: Shaviv, Roey , Emesh, Ismail T. , Argyris, Dimitrios , Aksu, Serdar
- 申请人: Applied Materials, Inc.
- 申请人地址: 3050 Bowers Avenue Santa Clara, CA 95054 US
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: 3050 Bowers Avenue Santa Clara, CA 95054 US
- 代理机构: Zimmermann & Partner Patentanwälte mbB
- 优先权: US201414292385 20140530; US201414292426 20140530; US201514637316 20150303
- 主分类号: C25D7/12
- IPC分类号: C25D7/12 ; C25D3/38 ; H01L21/768 ; C25D3/02
摘要:
In accordance with one embodiment of the present disclosure, a method for depositing metal on a reactive metal film on a workpiece includes electrochemically depositing a metallization layer on a seed layer formed on a workpiece using a plating electrolyte having at least one plating metal ion, a pH range of about 1 to about 6, and applying a cathodic potential in the range of about -0.5 V to about -4 V. The workpiece includes a barrier layer disposed between the seed layer and a dielectric surface of the workpiece, the barrier layer including a first metal having a standard electrode potential more negative than 0 V and the seed layer including a second metal having a standard electrode potential more positive than 0 V.
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