发明公开
EP2962252A1 METHOD OF ELECTRON BEAM IMAGING OF A SPECIMEN BY COMBINING IMAGES OF AN IMAGE SEQUENCE
审中-公开
VERFAHREN ZUR ELEKTRONENSTRAHLABBILDUNG EINER探索者出游KONBINATION VON BILDERN EINER BILDSEQUENZ
- 专利标题： METHOD OF ELECTRON BEAM IMAGING OF A SPECIMEN BY COMBINING IMAGES OF AN IMAGE SEQUENCE
- 专利标题（中）： VERFAHREN ZUR ELEKTRONENSTRAHLABBILDUNG EINER探索者出游KONBINATION VON BILDERN EINER BILDSEQUENZ
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申请号： EP14756368.8申请日： 2014-02-28
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公开(公告)号： EP2962252A1公开(公告)日： 2016-01-06
- 发明人: BAMMES, Benjamin Eugene , JIN, Liang
- 申请人： Direct Electron, LP
- 申请人地址： 13240 Evening Creek S. Suite 311 San Diego, CA 92128 US
- 专利权人： Direct Electron, LP
- 当前专利权人： Direct Electron, LP
- 当前专利权人地址： 13240 Evening Creek S. Suite 311 San Diego, CA 92128 US
- 代理机构： Mackenzie, Andrew Bryan
- 优先权： US201361770459P 20130228
- 国际公布： WO2014134400 20140904
- 主分类号： G06K9/00
- IPC分类号： G06K9/00
摘要：
A method of imaging of a specimen exposed to an electron beam signal includes acquiring an image sequence of sequential images of the specimen. Each subsequent image in the image sequence represents increased cumulative electron beam signal exposure on the specimen. The method includes collecting cumulative exposure data for each image of the image sequence. The method includes applying a low-pass image processing filter to the images of the image sequence using the cumulative exposure data corresponding to each image to which the filter is being applied to produce processed images. The method includes combining the processed images to produce a final image. A method of imaging is also provided that includes selectively discarding images in the image sequence.
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