METHOD OF ELECTRON BEAM IMAGING OF A SPECIMEN BY COMBINING IMAGES OF AN IMAGE SEQUENCE
    1.
    发明公开
    METHOD OF ELECTRON BEAM IMAGING OF A SPECIMEN BY COMBINING IMAGES OF AN IMAGE SEQUENCE 审中-公开
    VERFAHREN ZUR ELEKTRONENSTRAHLABBILDUNG EINER探索者出游KONBINATION VON BILDERN EINER BILDSEQUENZ

    公开(公告)号:EP2962252A1

    公开(公告)日:2016-01-06

    申请号:EP14756368.8

    申请日:2014-02-28

    IPC分类号: G06K9/00

    摘要: A method of imaging of a specimen exposed to an electron beam signal includes acquiring an image sequence of sequential images of the specimen. Each subsequent image in the image sequence represents increased cumulative electron beam signal exposure on the specimen. The method includes collecting cumulative exposure data for each image of the image sequence. The method includes applying a low-pass image processing filter to the images of the image sequence using the cumulative exposure data corresponding to each image to which the filter is being applied to produce processed images. The method includes combining the processed images to produce a final image. A method of imaging is also provided that includes selectively discarding images in the image sequence.

    摘要翻译: 暴露于电子束信号的样本的成像方法包括获取样本的顺序图像的图像序列。 图像序列中的每个后续图像表示样品上增加的累积电子束信号曝光。 该方法包括收集图像序列的每个图像的累积曝光数据。 该方法包括使用与应用滤波器的每个图像对应的累积曝光数据来对图像序列的图像应用低通图像处理滤波器以产生经处理的图像。 该方法包括组合经处理的图像以产生最终图像。 还提供了一种成像方法,其包括选择性地丢弃图像序列中的图像。

    Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy
    3.
    发明公开
    Apparatus and method including a direct bombardment detector and a secondary detector for use in electron microscopy 有权
    装置和方法具有直接火情检测器和用于在电子显微镜中使用的第二检测器

    公开(公告)号:EP2426694A1

    公开(公告)日:2012-03-07

    申请号:EP11189393.9

    申请日:2009-07-30

    IPC分类号: H01J37/244 H01J37/26

    摘要: An apparatus for use with an electron beam for imaging a sample. The apparatus has a down-conversion detector (14) configured to detect an electron microscopy signal (32) generated by the electron beam (30) incident on the sample (26), a direct bombardment detector (16) adjacent to the down-conversion detector (14) and configured to detect the electron microscopy signal (32), and a mechanism (18) selectively exposing the down-conversion detector (14) and the direct bombardment (16) detector to the electron microscopy signal (32). A method using the apparatus is also provided.

    摘要翻译: 对于用电子束使用到用于成像的样品的装置。 该装置具有配置在通过对样品(26)的电子束(30)入射产生电子显微镜信号(32),以检测一个下转换检测器(14),直接轰击检测器(16)相邻的下变频 检测器(14)和配置成检测所述电子显微镜信号(32),和一个机构(18)选择性地暴露下转换检测器(14)和所述直接轰击(16)检测器的电子显微镜信号(32)。 因此,提供使用该装置的方法。

    A SYSTEM, APPARATUS, AND METHOD FOR DETERMINING ELEMENTAL COMPOSITION USING 4D STEM

    公开(公告)号:EP4333452A2

    公开(公告)日:2024-03-06

    申请号:EP24150794.6

    申请日:2020-04-17

    IPC分类号: H04N25/531

    摘要: The present disclosure relates to transmission electron microscopy for evaluation of biological matter. According to an embodiment, the present disclosure further relates to an apparatus for determining the structure and/or elemental composition of a sample using 4D STEM, comprising a direct bombardment detector operating with global shutter readout, processing circuitry configured to acquire images of bright-field disks using either a contiguous array or non-contiguous array of detector pixel elements, correct distortions in the images, align each image of the images based on a centroid of the bright-field disk, calculate a radial profile of the images, normalize the radial profiles by a scaling factor, calculate the rotationally-averaged edge profile of the bright-field disk, and determine elemental composition within the specimen based on the characteristics of the edge profile of the bright-field disk corresponding to each specimen location.