发明公开
EP2985780A1 SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD
有权
用于扫描电子显微镜的样品架，扫描电子显微镜图像观察系统和扫描电子显微镜图像观察方法
- 专利标题： SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD
- 专利标题（中）： 用于扫描电子显微镜的样品架，扫描电子显微镜图像观察系统和扫描电子显微镜图像观察方法
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申请号： EP14783084.8申请日： 2014-03-24
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公开(公告)号： EP2985780A1公开(公告)日： 2016-02-17
- 发明人: OGURA, Toshihiko
- 申请人： National Institute of Advanced Industrial Science and Technology
- 申请人地址： 3-1, Kasumigaseki 1-chome Chiyoda-ku Tokyo 100-8921 JP
- 专利权人： National Institute of Advanced Industrial Science and Technology
- 当前专利权人： National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址： 3-1, Kasumigaseki 1-chome Chiyoda-ku Tokyo 100-8921 JP
- 代理机构： Gill, David Alan
- 优先权： JP2013080490 20130408
- 国际公布： WO2014167787 20141016
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; G01N23/00 ; H01J37/244 ; H01J37/28 ; H01J37/22
摘要：
A water solution (20) in which an observation sample (10) is, for example, dissolved is sandwiched on a first insulative thin film (203) side provided under a conductive thin film 201. When an electron beam incident part is charged minus, electric dipoles of water molecules are arrayed along a potential gradient. Electric charges are also generated on the surface of a second insulative thin film (204). The electric charges are detected by a terminal section (210) and changes to a measurement signal. In a state in which an electron beam (102) is blocked, the minus potential disappears. Consequently, the electric charges on the surface of the first insulative thin film (203) also disappear, and the measurement signal output from the terminal section (210) changes to 0.
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