发明公开
EP2998112A4 PROTECTIVE FILM, REFLECTIVE MEMBER, AND PRODUCTION METHOD FOR PROTECTIVE FILM 有权
保护膜,反射元件和方法保护膜

PROTECTIVE FILM, REFLECTIVE MEMBER, AND PRODUCTION METHOD FOR PROTECTIVE FILM
摘要:
A protective film placed on an upper part of a metal film for protecting the metal film placed on a glass substrate. The protective film includes a silica film. The silica film has an extinction coefficient "k" less than or equal to 1 X 10 -4 , a refractive index "n" greater than or equal to 1.466 at a wavelength of 632 nm, and a carbon content less than or equal to 3 atomic %.
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