发明公开
- 专利标题: SPECTRAL MICROSCOPY DEVICE
- 专利标题(中): 光谱显微镜装置
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申请号: EP14804344.1申请日: 2014-05-21
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公开(公告)号: EP3004840A1公开(公告)日: 2016-04-13
- 发明人: KYOGAKU, Masafumi
- 申请人: Canon Kabushiki Kaisha
- 申请人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: 30-2 Shimomaruko 3-chome Ohta-ku Tokyo 146-8501 JP
- 代理机构: Northway, Daniel Robert
- 优先权: JP2013113182 20130529
- 国际公布: WO2014192257 20141204
- 主分类号: G01N21/27
- IPC分类号: G01N21/27 ; G01N21/65
摘要:
A spectral microscopy device includes a spectral detecting unit including a light source that is capable of controlling an output wavelength, a microscope section that is provided with an observation area that is illuminated with light output from the light source, and a signal detector that detects light from the observation area as spectral data; a moving unit configured to move the observation area; and a controller that performs a control operation to allow the spectral detecting unit and the moving unit to move in response to each other. The spectral microscopy device is controlled so that switching between different measurement conditions based on the number of measurement points is performed at an observation area movement time in which the observation area is moved by the moving unit and measurement is performed and at a observation area movement stoppage time in which the observation area is fixed and measurement is performed, and spectral data is detected.
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