发明公开
- 专利标题: COMPOSITION FOR SILICON WAFER POLISHING
- 专利标题(中): POLIERZUSAMMENSETZUNGFÜRSILICIUMWAFER
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申请号: EP14807048.5申请日: 2014-05-02
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公开(公告)号: EP3007213A1公开(公告)日: 2016-04-13
- 发明人: TSUCHIYA, Kohsuke , TANSHO, Hisanori , ICHITSUBO, Taiki , MORI, Yoshio
- 申请人: Fujimi Incorporated
- 申请人地址: 1-1 Chiryo 2-chome Nishibiwajima-cho Kiyosu-shi, Aichi 452-8502 JP
- 专利权人: Fujimi Incorporated
- 当前专利权人: Fujimi Incorporated
- 当前专利权人地址: 1-1 Chiryo 2-chome Nishibiwajima-cho Kiyosu-shi, Aichi 452-8502 JP
- 代理机构: Grünecker Patent- und Rechtsanwälte PartG mbB
- 优先权: JP2013120328 20130607; JP2014010836 20140123
- 国际公布: WO2014196299 20141211
- 主分类号: H01L21/304
- IPC分类号: H01L21/304 ; B24B37/00 ; C09K3/14
摘要:
This invention provides a silicon wafer polishing composition used in the presence of an abrasive. The composition comprises a silicon wafer polishing accelerator, an amide group-containing polymer, and water. The amide group-containing polymer has a building unit A in its main chain. The building unit A comprises a main chain carbon atom constituting the main chain of the amide group-containing polymer and a secondary amide group or a tertiary amide group. The carbonyl carbon atom constituting the secondary amide group or tertiary amide group is directly coupled to the main chain carbon atom.
公开/授权文献
- EP3007213B1 USE OF A COMPOSITION FOR SILICON WAFER POLISHING 公开/授权日:2020-03-18
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