发明公开
- 专利标题: VACUUM PUMP
- 专利标题(中): 真空泵
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申请号: EP14820662.6申请日: 2014-06-06
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公开(公告)号: EP3018354A1公开(公告)日: 2016-05-11
- 发明人: SAKAGUCHI Yoshiyuki , MIWATA Tooru , MITSUHASHI Keita
- 申请人: Edwards Japan Limited
- 申请人地址: 1078-1 Yoshihashi Yachiyo-shi, Chiba 276-8523 JP
- 专利权人: Edwards Japan Limited
- 当前专利权人: Edwards Japan Limited
- 当前专利权人地址: 1078-1 Yoshihashi Yachiyo-shi, Chiba 276-8523 JP
- 代理机构: Clark, Charles Robert
- 优先权: JP2013141863 20130705
- 国际公布: WO2015001911 20150108
- 主分类号: F04D19/04
- IPC分类号: F04D19/04
摘要:
A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.
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