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公开(公告)号：EP4279746A1
公开(公告)日：2023-11-22
申请号：EP22739388.1
申请日：2022-01-11
发明人： MIWATA Tooru , SAKAGUCHI Yoshiyuki
IPC分类号： F04D19/04
摘要： There are provided a vacuum pump which can effectively prevent stress corrosion cracking of a rotating body and has excellent corrosion resistance, and a rotating body of the vacuum pump. In a vacuum pump (e.g., a turbo-molecular pump 100) exhausting gas by rotation of a rotating body 103, the rotating body 103 has, on a surface thereof, a first area 1 covered with a first surface treatment layer 1A and a second area 2 covered with a second surface treatment layer 2A, and a boundary portion 3 between the first area 1 and the second area 2 has an area in which the surface treatment layers 1A and 1B of the first and second areas 1 and 2 overlap each other.
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2.发明公开
公开(公告)号：EP3572667A1
公开(公告)日：2019-11-27
申请号：EP18741548.4
申请日：2018-01-12
发明人： SAKAGUCHI Yoshiyuki , SUN Yanbin , SAEGUSA Kengo , OMORI Hideki
摘要： Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.
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3.发明公开THREAD GROOVE PUMP MECHANISM, VACUUM PUMP USING THIS THREAD GROOVE PUMP MECHANISM, AND ROTOR, OUTER-CIRCUMFERENTIAL STATOR, AND INNER-CIRCUMFERENTIAL STATOR USED IN THIS THREAD SCREW PUMP MECHANISM 审中-公开螺纹泵机制，用这种螺纹槽泵机械结构且转子真空泵和AUSSENUMGEBUNGSSTATOR INNENUMGEBUNGSSTATOR在这个线程槽泵送机构
公开(公告)号：EP3054165A1
公开(公告)日：2016-08-10
申请号：EP14849788.6
申请日：2014-09-01
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D19/044
摘要： The present invention provides a thread groove pump mechanism which suppresses a backflow of the gas in the thread groove pump mechanism and reduces the pressure difference in the pump radial direction near the outlet of the thread groove pump mechanism to thereby improve the exhaust performance and the compression performance. The present invention also provides a vacuum pump including the thread groove pump mechanism, and a rotor, an outer circumference side stator, and an inner circumference side stator used in the thread groove pump mechanism. A thread groove pump mechanism includes an exhaust-performance improving means in an outer-circumference-side thread groove portion engraved on an opposite surface of an outer circumference side stator opposed to a rotor cylinder portion and an inner-circumference-side thread groove portion engraved on an opposite surface of an inner circumference side stator opposed to the rotor cylinder portion.
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公开(公告)号：EP3128178A1
公开(公告)日：2017-02-08
申请号：EP15772176.2
申请日：2015-02-27
IPC分类号： F04D19/04
CPC分类号： F04D29/5853 , F04D19/042 , F04D29/023 , F04D29/522 , F04D29/584 , F05D2250/52 , F05D2260/607
摘要： Provided is an outlet port part capable of efficiently increasing the temperature of an entire outlet port of a vacuum pump in which the outlet port part is disposed, and the vacuum pump provided with this outlet port part. The outlet port part according to an embodiment of the present invention has a heat insulating portion for preventing heat obtained from a heater disposed in the outlet port part from being transmitted toward a base side, and for transmitting the heat efficiently to the back (the vacuum pump side) of the outlet port. Further, the vacuum pump according to the embodiment of the present invention has the outlet port part having the heat insulating portion. The heat insulating portion of the outlet port part according to the embodiment is provided with a flange portion formed on the outer peripheral surface of the outlet port part, and a heat insulating spacer disposed in close contact with the flange portion. Alternatively, an outlet port part flange portion that is configured by integrating the flange portion formed on the outer peripheral surface of the outlet port part and the foregoing heat insulating spacer functions as the heat insulating portion. This configuration can efficiently increase the temperature of the entire outlet port of the vacuum pump, thereby reducing the amount of product and deposit.
摘要翻译： 提供了能够有效地提高设置有出口部的真空泵的整个出口的温度的出口部，以及设置有该出口部的真空泵。 根据本发明的实施例的出口部分具有用于防止从布置在出口部分中的加热器获得的热量朝向基部侧传递的热绝缘部分，并且用于将热量有效地传递到背部（真空 泵侧）。 此外，根据本发明实施例的真空泵具有具有绝热部分的出口部分。 本实施方式的出口部的隔热部设置有形成在出口部的外周面的凸缘部和与凸缘部紧密接触的隔热隔离部。 或者，通过将形成在出口部分的外周面上的凸缘部分和上述绝热垫圈相结合的出口部分凸缘部分用作隔热部分。 该配置可以有效地提高真空泵的整个出口的温度，从而减少产品和沉积物的量。
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公开(公告)号：EP3029328A1
公开(公告)日：2016-06-08
申请号：EP14832961.8
申请日：2014-06-06
发明人： SAKAGUCHI Yoshiyuki
IPC分类号： F04D19/04
CPC分类号： F04D29/5853 , F04D19/00 , F04D19/04 , F04D19/044 , F04D29/384 , F04D29/544 , F04D29/584 , F04D29/644 , F05D2260/607
摘要： An object is to provide a vacuum pump that enables, without being affected by a flow rate of gas to be discharged, concentrated and efficient heating of only a stator component of an exhaust side gas channel that needs to be heated in order to prevent deposition of products and that also enables prevention of deposition of products in the exhaust side gas channel as a result of the heating, and improvement of pump emission performance. The vacuum pump has a rotor rotatably arranged on a pump base and a gas channel through which gas sucked by rotation of the gas is guided to an outlet port, and further includes heat insulating means for thermally insulating a stator component, which forms an exhaust side gas channel in the gas channel, from other components and heating means for heating the thermally insulated stator component.
摘要翻译： 本发明的目的是提供一种真空泵，其能够在不受排出气体的流量影响的情况下仅对需要加热的排气侧气体通道的定子部件进行浓缩和有效加热，以防止沉积 并且还能够防止由于加热而在排气侧气体通道中沉积产品，并且改善泵排放性能。 真空泵具有可旋转地设置在泵基座上的转子和气体通道，通过气体通道将通过气体的旋转吸入的气体引导至出口，并且还包括绝热装置，用于使形成排气侧的定子部件 气体通道中的气体通道，其他部件和用于加热绝热定子部件的加热装置。
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公开(公告)号：EP2623792A1
公开(公告)日：2013-08-07
申请号：EP11828596.4
申请日：2011-07-25
发明人： SAKAGUCHI Yoshiyuki , ITO Akihiro , WADA Akihiko
IPC分类号： F04D19/04
CPC分类号： F04D3/00 , F04D19/042 , F04D19/044 , F04D29/644 , F04D29/662 , F05D2230/10
摘要： Provided is an exhaust pump that comprises connecting opening portions that can be deburred easily and that are suitable for enhancing gas evacuation performance. A rotor (a cylindrical rotating member) of an exhaust pump comprises a plate body that has a ring-like projection on a reverse side outer peripheral section of the rotor, and a cylindrical body that is fitted into an outer periphery of the ring-like projection. Connecting opening portions of the exhaust pump comprise holes that are formed by notching an outer peripheral section of the plate body and an outer peripheral section of the ring-like projection, and a portion (specifically, a hole) of the holes that opens in the form of a horizontal hole is covered by an outer-peripheral upper end portion of the cylindrical body.
摘要翻译： 提供一种排气泵，其包括可以容易地去毛刺并且适于增强排气性能的连接开口部分。 排气泵的转子（圆柱形旋转构件）包括：板本体，其在转子的背面外周部具有环状突起，以及嵌合于环状外周部的圆筒体 投影。 排气泵的连接开口部包括通过切割板体的外周部和环状突起的外周部而形成的孔，以及在该开口部的孔的部分（具体为孔） 水平孔的形状被筒体的外周上端部覆盖。
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公开(公告)号：EP3048306A1
公开(公告)日：2016-07-27
申请号：EP14846575.0
申请日：2014-06-06
发明人： SAKAGUCHI Yoshiyuki
IPC分类号： F04D19/04
CPC分类号： F04D29/023 , F04D17/168 , F04D19/042 , F04D25/06 , F04D29/28 , F04D29/4206 , F04D29/444 , F04D29/522 , F04D29/644 , F05D2230/21 , F05D2300/518
摘要： The present invention provides a stator component of a vacuum pump, which is suitable for reducing the fracture energy (energy of fracture that occurs when a rotor of the pump is damaged during its rotation) and the size of the pump, and also provides a vacuum pump having this stator component. In the vacuum pump, a spacer or of a thread groove pump stator, which is a stator component forms a gap satisfying the following > between an outer circumferential surface of each of housed in a pump case of the vacuum pump, and an inner circumferential surface of the pump case, with the stator component being housed in the pump case. «Condition» 2d/D ≤ ε max , where D is the outer diameter of the stator component (spacer or thread groove pump stator), d is the width of the gap, and ε max is the breaking elongation of the stator component.
摘要翻译： 本发明提供了一种真空泵的定子部件，其适用于降低断裂能（当泵的转子在其旋转期间损坏时发生的断裂能量）和泵的尺寸，并且还提供真空 泵具有该定子部件。 在真空泵中，作为定子部件的间隔件或螺纹槽泵定子在容纳在真空泵的泵壳体中的每个的外周面之间形成满足以下“条件”的间隙，以及 泵壳的内圆周表面，其中定子部件容纳在泵壳体中。 «条件»2d / D‰¤μmax，其中D是定子部件（间隔器或螺纹槽泵定子）的外径，d是间隙的宽度，μmax是定子部件的断裂伸长率。
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公开(公告)号：EP3018354A1
公开(公告)日：2016-05-11
申请号：EP14820662.6
申请日：2014-06-06
IPC分类号： F04D19/04
CPC分类号： F04D19/04 , F04D17/168 , F04D19/044 , F04D29/28 , F04D29/32 , F04D29/324 , F04D29/444 , F04D29/542 , F04D29/544 , F05D2240/122 , F05D2240/304 , F05D2250/70 , F05D2260/607
摘要： A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.
摘要翻译： 提供一种真空泵，其抑制螺纹槽的排气侧出口中的气体产物的出现并且长期保持泵性能。 真空泵包括流入抑制壁，所述流入抑制壁通过在内周侧定子的外周表面上沿着排气方向延伸的脊部的排气侧端部更大地形成，所述流入抑制壁在转子旋转方向上比进气侧端部 所述流入抑制壁抑制了在脊部之间雕刻的螺纹槽的排气侧出口中的气体滞留。
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公开(公告)号：EP2894347A1
公开(公告)日：2015-07-15
申请号：EP13835610.0
申请日：2013-08-26
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D19/044 , F04D29/023 , F04D29/38 , F04D29/542 , F04D29/58 , F04D29/5853 , F05B2260/231 , F05B2280/1021 , F05B2280/1071 , F05B2280/4008 , F05B2280/4009 , F05B2280/6003 , F05D2260/607 , F05D2300/121 , F05D2300/171 , F05D2300/173 , F05D2300/434 , F05D2300/436 , F05D2300/5024 , F05D2300/603
摘要： The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.
摘要翻译： 本发明提供了一种定子侧部件，其设置在真空泵中，并且不设置绝热材料，防止产品沉积在螺纹槽泵单元的下侧，该下侧为区域 产生（沉积物）沉积容易发生的高压，并且还提供配备有该定子侧构件的真空泵。 配置成具有低于预定值的导热系数的螺纹槽间隔件布置在配备有螺纹槽泵单元的真空泵中。 （1）螺纹槽间隔件由导热系数低于与螺纹槽隔离件相对或接触的构件的导热系数的材料制成。 具体地说，该材料的导热系数低于铝或铝合金的导热系数，优选为不锈钢，纤维增强塑料，聚醚酰亚胺和聚醚醚酮中的任一种。 （2）螺纹槽间隔件由至少两个以上构成。
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公开(公告)号：EP3379086A1
公开(公告)日：2018-09-26
申请号：EP16866137.9
申请日：2016-10-31
发明人： SAKAGUCHI Yoshiyuki
IPC分类号： F04D19/04
CPC分类号： F04D29/5853 , F04D19/04 , F04D19/042 , F04D27/006
摘要： Provided is a vacuum pump that prevents the solidification of gas while being operated properly. The vacuum pump includes a rotor that is supported rotatably on a base, a stator that has a thread groove portion, and a heating structure that heats the stator. The heating structure has a spacer that insulates the stator from stator components other than the stator, and a cartridge heater that heats the stator. The distance between a rotor cylindrical portion and the stator at the inlet port side is set to be equal to or greater than the distance between the rotor cylindrical portion and the stator at the outlet port side.
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