发明授权
- 专利标题： METHOD FOR EVALUATING SUITABILITY OF SILICA POWDER FOR MANUFACTURING OF SILICA-GLASS CRUCIBLE FOR PULLING SILICON SINGLE CRYSTAL
- 专利标题（中）： 一种评价硅粉用于制造硅玻璃坩埚用于拉硅单晶的适用性的方法
-
申请号： EP13888555.3申请日： 2013-06-30
-
公开(公告)号： EP3018468B1公开(公告)日： 2017-12-20
- 发明人: SUDO Toshiaki , SATO Tadahiro , KITAHARA Ken , HINOOKA Makiko
- 申请人： SUMCO Corporation
- 申请人地址： 2-1, Shibaura 1-chome Minato-ku Tokyo 105-8634 JP
- 专利权人： SUMCO Corporation
- 当前专利权人： SUMCO Corporation
- 当前专利权人地址： 2-1, Shibaura 1-chome Minato-ku Tokyo 105-8634 JP
- 代理机构： Gulde & Partner
- 国际公布： WO2015001592 20150108
- 主分类号： G01N21/55
- IPC分类号： G01N21/55 ; G01N15/08 ; C03B19/09 ; G01N15/10 ; G01N33/00 ; G01N15/00 ; C30B29/06 ; C30B15/10 ; C03B1/00 ; G02B21/00
摘要：
An evaluation method of suitable silica powder for forming a bubble-free layer of a vitreous silica crucible for pulling of a silicon single crystal, includes: a process of measuring a porosity between silica particles in the silica powder, a process of melting the silica powder, a process of measuring a bubble content rate of a vitreous silica block obtained by cooling to harden the melted silica powder, and a process of determining whether the silica powder is suitable from the porosity of the silica powder and the bubble content rate of the vitreous silica block.
公开/授权文献
信息查询
