发明公开
EP3038126A1 MEMS structure with thick movable membrane
审中-公开
MEMS-Struktur mit dicker bewegbarer Membran
- 专利标题： MEMS structure with thick movable membrane
- 专利标题（中）： MEMS-Struktur mit dicker bewegbarer Membran
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申请号： EP14307128.0申请日： 2014-12-22
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公开(公告)号： EP3038126A1公开(公告)日： 2016-06-29
- 发明人: Rollier, Anne-Sophie , Bonnabel, Antoine , Segueni, Karim
- 申请人： DelfMEMS SAS
- 申请人地址： Bat B, Park Plaza II 11 rue de l'Harmonle 59650 Villeneuve d'Ascq FR
- 专利权人： DelfMEMS SAS
- 当前专利权人： DelfMEMS SAS
- 当前专利权人地址： Bat B, Park Plaza II 11 rue de l'Harmonle 59650 Villeneuve d'Ascq FR
- 代理机构： Grünecker Patent- und Rechtsanwälte PartG mbB
- 主分类号： H01H59/00
- IPC分类号： H01H59/00
摘要：
The present invention relates to a method of manufacturing an MEMS device that comprises the steps of forming a first membrane layer over a sacrificial base layer, forming a second membrane layer over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer and forming stoppers to restrict movement of the first membrane layer. Moreover, it is provided MEMS device comprising a movable membrane comprising a first membrane layer and a second membrane layer formed over the first membrane layer, wherein the second membrane layer comprises lateral recesses exposing lateral portions of the first membrane layer.
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