发明公开
- 专利标题： OPTICAL ALIGNMENT TOOL
- 专利标题（中）： WERKZEUGFÜROPTISCHE AUSRICHTUNG
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申请号： EP14766590.5申请日： 2014-08-28
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公开(公告)号： EP3039409A1公开(公告)日： 2016-07-06
- 发明人: EARNEY, John , WATSON, Dakota , PINTO, Joseph
- 申请人： Illumina, Inc.
- 申请人地址： 5200 Illumina Way San Diego, CA 92122 US
- 专利权人： Illumina, Inc.
- 当前专利权人： Illumina, Inc.
- 当前专利权人地址： 5200 Illumina Way San Diego, CA 92122 US
- 代理机构： Holzwarth-Rochford, Andreas
- 优先权： US201361871181P 20130828
- 国际公布： WO2015031596 20150305
- 主分类号： G01N21/64
- IPC分类号： G01N21/64 ; B01L3/00
摘要：
Provided is an inspection apparatus including: (a) a translucent or transparent plate having a bottom surface, at least a portion of the bottom surface having an opaque material printed thereon in a pattern having at least one transparent or translucent portion; and (b) a chamber disposed below the bottom surface, whereby light emitted from the chamber or through the chamber can pass through the at least one transparent or translucent portion.
公开/授权文献
- EP3039409B1 OPTICAL ALIGNMENT TOOL 公开/授权日：2017-11-08
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