发明公开
EP3044541A1 GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION
有权
GYROSKOPSTRUKTUR UND GYROSKOP MIT VERBESSERTER QUADRATURKOMPENSATION
- 专利标题: GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION
- 专利标题(中): GYROSKOPSTRUKTUR UND GYROSKOP MIT VERBESSERTER QUADRATURKOMPENSATION
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申请号: EP14776734.7申请日: 2014-09-10
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公开(公告)号: EP3044541A1公开(公告)日: 2016-07-20
- 发明人: RINKIÖ, Marcus , BLOMQVIST, Anssi , RUOHIO, Jaakko
- 申请人: Murata Manufacturing Co., Ltd.
- 申请人地址: 10-1, Higashikotari 1-chome Nagaokakyo-shi, Kyoto 617-8555 JP
- 专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人: Murata Manufacturing Co., Ltd.
- 当前专利权人地址: 10-1, Higashikotari 1-chome Nagaokakyo-shi, Kyoto 617-8555 JP
- 代理机构: Boco IP Oy Ab
- 优先权: FI20135916 20130911
- 国际公布: WO2015036923 20150319
- 主分类号: G01C19/5712
- IPC分类号: G01C19/5712 ; G01C19/5755 ; G01C19/5776
摘要:
A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.
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