发明公开
EP3044541A1 GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION 有权
GYROSKOPSTRUKTUR UND GYROSKOP MIT VERBESSERTER QUADRATURKOMPENSATION

GYROSCOPE STRUCTURE AND GYROSCOPE WITH IMPROVED QUADRATURE COMPENSATION
摘要:
A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass.
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