发明授权
- 专利标题: CONTAINER FOR STORING PHOTOMASK BLANKS
- 专利标题(中): 用于存放照片底座的容器
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申请号: EP14844507.5申请日: 2014-07-24
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公开(公告)号: EP3045973B1公开(公告)日: 2018-04-11
- 发明人: SUZUKI, Tsutomu , OHORI, Shinichi , KOITABASHI, Ryuji , NAKAGAWA, Hideo , TAKASAKA, Takuro , KINOSHITA, Takahiro , FUKUDA, Hiroshi
- 申请人: Shin-Etsu Polymer Co. Ltd. , Shin-Etsu Chemical Co., Ltd.
- 申请人地址: 1-9, Kanda-Sudacho Chiyoda-ku Tokyo 101-0041 JP
- 专利权人: Shin-Etsu Polymer Co. Ltd.,Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Polymer Co. Ltd.,Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: 1-9, Kanda-Sudacho Chiyoda-ku Tokyo 101-0041 JP
- 代理机构: Schäfer, Matthias W.
- 优先权: JP2013188177 20130911
- 国际公布: WO2015037176 20150319
- 主分类号: G03F1/66
- IPC分类号: G03F1/66 ; H01L21/673
摘要:
The purpose of the present invention is to further reliably reduce the contamination of photomask blanks due to the adherence of the dust and particles generated during the storage, transportation, or operation of the container while suppressing the effect on a resist pattern, thereby improving the quality and yield of the photomask blanks. The present invention pertains to a container (1) for storing photomask blanks that stores, transports, or safeguards photomask blanks (2), wherein at least one of the components is constituted by a thermoplastic resin where the amount of caprolactam measured by the dynamic head space method when kept for 60 minutes at 40°C is 0.01 ppm or less n-decane conversion amount per resin weight, and the surface resistance value is no more than 1.0E + 13 ohms.
公开/授权文献
- EP3045973A1 CONTAINER FOR STORING PHOTOMASK BLANKS 公开/授权日:2016-07-20
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