发明公开
- 专利标题： MULTIPLE ANGLES OF INCIDENCE SEMICONDUCTOR METROLOGY SYSTEMS AND METHODS
- 专利标题（中）： 麻疯病基因食品
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申请号： EP14843577.9申请日： 2014-09-15
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公开(公告)号： EP3047520A1公开(公告)日： 2016-07-27
- 发明人: WANG, David Y. , FLOCK, Klaus , ROTTER, Lawrence D. , KRISHNAN, Shankar , DE VEER, Johannes D. , FILIP, Catalin , BRADY, Gregory , ARAIN, Muzammil , SHCHEGROV, Andrei
- 申请人： Kla-Tencor Corporation
- 申请人地址： One Technology Drive Milpitas, California 95035 US
- 专利权人： Kla-Tencor Corporation
- 当前专利权人： Kla-Tencor Corporation
- 当前专利权人地址： One Technology Drive Milpitas, California 95035 US
- 代理机构： Keane, Paul Fachtna
- 优先权： US201361878561P 20130916; US201314043783 20131001
- 国际公布： WO2015039031 20150319
- 主分类号： H01L21/66
- IPC分类号： H01L21/66
摘要：
An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.
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