发明公开
EP3049449A1 UNDERLAYER COMPOSITION FOR PROMOTING SELF ASSEMBLY AND METHOD OF MAKING AND USING
有权
下层组成,以促进自组装方法制备方法和用途
- 专利标题: UNDERLAYER COMPOSITION FOR PROMOTING SELF ASSEMBLY AND METHOD OF MAKING AND USING
- 专利标题(中): 下层组成,以促进自组装方法制备方法和用途
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申请号: EP14772163.3申请日: 2014-09-24
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公开(公告)号: EP3049449A1公开(公告)日: 2016-08-03
- 发明人: WU, Hengpeng , YIN, Jian , LIN, Guanyang , KIM, Jihoon , SHAN, Jianhui
- 申请人: AZ Electronic Materials (Luxembourg) S.à.r.l.
- 申请人地址: 32-36, Boulevard d`Avranches 1160 Luxembourg LU
- 专利权人: AZ Electronic Materials (Luxembourg) S.à.r.l.
- 当前专利权人: AZ Electronic Materials (Luxembourg) S.à.r.l.
- 当前专利权人地址: 32-36, Boulevard d`Avranches 1160 Luxembourg LU
- 代理机构: Rippel, Hans Christoph
- 优先权: US201314039809 20130927
- 国际公布: WO2015044215 20150402
- 主分类号: C08F220/14
- IPC分类号: C08F220/14
摘要:
Disclosed herein is a formulation for depositing a cured underlayer for promoting the formation of self assembled structures. The underlayer comprises: (a) a polymer comprising at least one pendant vinyl ether monomer repeat unit having the structure, (I): wherein R is chosen from H, C1-C4 alkyl, or halogen, and W is a divalent group chosen from C1-C6 alkylene, C6-C20 arylene, benzylene, or C2-C20 alkyleneoxyalkylene; (ii) optional thermal acid generator; and (c) a solvent. The invention also relates to processes of forming a pattern using the underlayer.
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