发明公开
EP3051277A3 ELECTRIC-FIELD ENHANCEMENT ELEMENT, ANALYSIS DEVICE, AND ELETRONIC APPARATUS
审中-公开
元用于改善电场时,分析装置和电子设备
- 专利标题: ELECTRIC-FIELD ENHANCEMENT ELEMENT, ANALYSIS DEVICE, AND ELETRONIC APPARATUS
- 专利标题(中): 元用于改善电场时,分析装置和电子设备
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申请号: EP16153339.3申请日: 2016-01-29
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公开(公告)号: EP3051277A3公开(公告)日: 2016-08-10
- 发明人: Mano, Tetsuo , Enari, Megumi
- 申请人: Seiko Epson Corporation
- 申请人地址: 4-1, Nishi-shinjuku 2-chome, Shinjuku-ku Tokyo 163 JP
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: 4-1, Nishi-shinjuku 2-chome, Shinjuku-ku Tokyo 163 JP
- 代理机构: Hoffmann Eitle
- 优先权: JP2015018433 20150202
- 主分类号: G01N21/65
- IPC分类号: G01N21/65 ; B82Y15/00 ; B82Y20/00 ; G01N21/552
摘要:
An electric-field enhancement element (100) includes a propagating surface plasmon generating unit (10); a localized surface plasmon generating unit (30) that is formed on an upper portion of a surface of a substrate and includes a plurality of fine metal structure bodies (32); and a metal layer (20) that is formed on an upper portion of the substrate surface and propagates a propagating surface plasmon generated by the propagating surface plasmon generating unit to the localized surface plasmon generating unit in a direction along the substrate surface, in which the fine metal structure body includes a plurality of fine metal structures (34) which are arranged to be separated from each other in a normal direction of the substrate surface.
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