发明公开
- 专利标题: POWER-SUPPLY DEVICE
- 专利标题(中): STROMVERSORGUNGSVORRICHTUNG
-
申请号: EP13895077申请日: 2013-10-04
-
公开(公告)号: EP3054750A4公开(公告)日: 2017-06-07
- 发明人: TABATA YOICHIRO , OKIHARA YUJIRO , NAKAMURA NORIYUKI , NISHIMURA SHINICHI
- 申请人: TOSHIBA MITSUBISHI-ELECTRIC IND SYSTEMS CORP
- 专利权人: TOSHIBA MITSUBISHI-ELECTRIC IND SYSTEMS CORP
- 当前专利权人: TOSHIBA MITSUBISHI-ELECTRIC IND SYSTEMS CORP
- 优先权: JP2013077033 2013-10-04
- 主分类号: C01B13/11
- IPC分类号: C01B13/11 ; H02M1/42 ; H02M7/48 ; H05H1/24 ; H05H1/46
摘要:
The present invention provides a power supply apparatus that automatically determines a driving frequency of an inverter in a system including a plasma generator and the power supply apparatus. A power supply apparatus (10) according to the present invention includes a controller (6) that performs the following action and resonance means (7) for creating a resonance state between the power supply apparatus (10) and a plasma generator (5). That is, the controller (6) changes, when a value of electric power input equal to 100% (or a value of electric power input equal to or more than a threshold % and equal to or less than 100%) of a rated power is instructed, an inverter frequency and obtains an inverter output power factor for each of a plurality of inverter frequencies. Then, the controller (6) determines, as a driving frequency of the inverter, one of the plurality of inverter frequencies at which the inverter output power factor is maximized.
信息查询