公开(公告)号：EP3054750A4

公开(公告)日：2017-06-07

申请号：EP13895077

申请日：2013-10-04

申请人： TOSHIBA MITSUBISHI-ELECTRIC IND SYSTEMS CORP

发明人： TABATA YOICHIRO ,  OKIHARA YUJIRO ,  NAKAMURA NORIYUKI ,  NISHIMURA SHINICHI

IPC分类号： C01B13/11 ,  H02M1/42 ,  H02M7/48 ,  H05H1/24 ,  H05H1/46

CPC分类号： H05H1/24 ,  C01B13/11 ,  H02M7/48 ,  H02M2007/4818 ,  H05H1/46 ,  H05H2001/4682 ,  Y02B70/1441 ,  Y02P20/121

摘要： The present invention provides a power supply apparatus that automatically determines a driving frequency of an inverter in a system including a plasma generator and the power supply apparatus. A power supply apparatus (10) according to the present invention includes a controller (6) that performs the following action and resonance means (7) for creating a resonance state between the power supply apparatus (10) and a plasma generator (5). That is, the controller (6) changes, when a value of electric power input equal to 100% (or a value of electric power input equal to or more than a threshold % and equal to or less than 100%) of a rated power is instructed, an inverter frequency and obtains an inverter output power factor for each of a plurality of inverter frequencies. Then, the controller (6) determines, as a driving frequency of the inverter, one of the plurality of inverter frequencies at which the inverter output power factor is maximized.

摘要翻译： 本发明提供一种电源装置，其在包括等离子体发生器和电源装置的系统中自动确定逆变器的驱动频率。 根据本发明的电源装置（10）包括执行以下动作的控制器（6）和用于在电源装置（10）和等离子体发生器（5）之间产生谐振状态的谐振装置（7）。 即，控制器（6）在输入的电力的额定功率的100％（或者输入电力的输入值为阈值％以上且100％以下）的值 指示逆变器频率，并且针对多个逆变器频率中的每一个获得逆变器输出功率因数。 然后，控制器（6）将逆变器输出功率因数最大的多个逆变器频率中的一个确定为逆变器的驱动频率。